Outline
This equipment efficiently collects large quantities of solids generated in the semiconductor and liquid crystal manufacturing process. It will have a major positive impact on the manufacturing process, including reduced frequency of pipe maintenance and increased up time.
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- RID-TRAPPER is a registered trademark in Japan.
Features
- 1. High capacity
- Supports capacities of 100l/min to 2,000l/min
- 2. High-performance filter
- Delivers high collection performance (99% or higher) thanks to cooling and filtering.
- 3. Ease of operation
- Even column replacement is very easy.
- 4. Air-tightness test
- Air-tightness of joints can be tested.
- 5. Custom specifications
- Unit dimensions and interlock mechanisms can be designed per customer specifications.
Specifications
- Gas flow
100l/min-2,000l/min (differs by model) - Solids include aluminum chloride.
Replacement
Collected solids are handled by UBE as industrial waste.
Filter Structure
System Configuration (200l/min type)
Warranty Period
The warranty period is one year.
System Dimensions
Utilities
| Electricity | 100V, 2.0KVA |
|---|---|
| Nitrogen | 3kg/cm, 5l/min |
| Cooling water | 1l/min. |
Inquiry
Products Inquiry
- UBE Corporation
- Specialty Products Div.
Specialty Products Business Dept.
Functional Products Gr. - Phone : +81(3)-5419-6186
- Fax : +81(3)-5419-6263
- Products Inquiry Form