High-purity aqueous ammonium
- Outline
- Properties
- Characteristics
- Packaging
- Handling Precautions
- Storage Precautions
- Regulatory Information
- Acceptable Concentration
Outline
With the increasingly high integration and miniaturization of semiconductor devices, there has been a growing demand for even higher quality and higher purity aqueous ammonium, which is used to clean silicon wafers. UBE's high-purity aqueous ammonium is a high-grade product with virtually no metal ion particles thanks to our integrated manufacturing under stringent quality control that covers everything from raw material refining to manufacturing and packaging.
Properties
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| Physical properties |
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Characteristics
- High purity, high quality
- Low metal ion content
- Low particle content
Packaging
Special polyethylene vessels
- Drums 170kg(200l)、90kg(100l)
- Cans 18kg(20l)
- Containers 900kg(1m³)
Handling Precautions
| Effect on human body |
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| Body protection |
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| Emergency treatment |
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| Others |
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Storage Precautions
- Structures for storing vessels containing this chemical should have adequate natural ventilation or a ventilation system.
- Since heating causes the release of ammonia gas, avoid exposure to direct sunlight and keep containers at 40°C or less.
- Handle carefully to avoid physically damaging vessels.
- Provide a place to wash face, a safety shower, and water plumbing near the area used for storing and handling.
Regulatory Information
| Poisonous and Deleterious Substances Control Law | Deleterious substances |
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| Labor Safety and Sanitation Law | Specified chemical substances |
| Regulations for the Transport and Storage of Dangerous Goods in Ships | Corrosive substances |
Permissible Concentration
| Acceptable Concentration | 25ppm(18mg/m³) |
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