Semiconductor Gas Products
Chemicals
Boron trichloride
UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.
UBE RID
This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless.
RID-TRAPPER
This equipment efficiently collects large quantities of solids generated in the semiconductor and liquid crystal manufacturing process. It will have a major positive impact on the manufacturing process, including reduced frequency of pipe maintenance and increased up time.
RID-ACE
The odor that results when cleaning chambers is largely the result of toxic gases such as HCl, HF, and Cl2. It worsens the work environment and is a major obstacle to work efficiency. This unit reduces these cases to the threshold limit value (TLV) or lower, thereby improving work efficiency.
- Chemicals
- Synthetic Rubber
- Engineering Plastics
- Caprolactam
- Industrial Chemicals
- Liquified Gas
- Polyethylene
- Ammonium Sulfate
- Polyimide
- Battery Materials
- Separation Membrane
- Fine Chemicals
- Ceramics
- High Purity Chemicals
- Semiconductor Gas Products
- Continuous Inorganic Fiber
- Products for Polyurethane Resins
- Pharmaceutical