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Chemicals: High Purity Chemicals

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Boron trichloride

With the increasing level of high performance and integration of super LSI devices and other IC products in the semiconductor industry, dry-etching gases are in high demand for use in ultrafine fabrication. UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires.

Packaging
  • Internal volume: 10l, or 47l
  • Filled weight: 10kg, 50kg
Uses
  • Dry-etching gas for aluminum wires
  • Gas for CVD
  • Raw material for boron nitride (BN)
  • Raw material for pharmaceuticals and agrochemicals
  • Raw material for catalysts
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Metal organic (MO) compounds

Full-fledged application of compound semiconductors to optoelectronics, HEMT, and GaAs ICs is underway, and metal organic chemical vapor deposition (MOCVD) is being used as an epitaxial crystal growth method. UBE's MO compounds are highly rated for their extremely high purity made possible by our refining, analysis, and handling technology accumulated as a chemical manufacturer. Our company is now achieving one success after another in the III-V and III-VI family of metal organic chemical vapor deposition (MOCVD) materials.

Packaging
  • Cylinders: 100ml, 150ml, 250ml, 330ml, 400ml, 600ml, 750ml, 1,150ml, 2,600ml
  • Stainless steel cylinders
Uses
  • Light-emitting diodes (LED)
  • Laser diodes (LD)
  • Field-effect transistors (FET)
  • ICs and high electron mobility transistors (HEMT) for high-speed computers
  • Hall devices
  • Solar cells
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Under Development

Metal complex materials for ALD/CVD

MOCVD and atomic layer deposition (ALD) are used for forming thin film layers in the field of electronics and semiconductors. UBE has developed a variety of precursors used in these formation methods using its proprietary composite and purification technology. UBE has a wide variety of materials ranging from metal materials (Ru, Co, Mn, etc.) used in wires, barriers and electrodes to materials (Al, Mg, Fe, Zn, etc.) for insulation and passivation films.

Packaging
  • Cylinders: Supplied in quantities from 100ml as needed.
  • Stainless steel cylinders
Uses
  • Semiconductor wires
  • Base coating for semiconductor wires
  • Semiconductor electrodes
  • Semiconductor insulations(Oxide film, Nitride film)
  • Passivations
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Details

High-purity aqueous ammonium

With the increasingly high integration and miniaturization of semiconductor devices, there has been a growing demand for even higher quality and higher purity aqueous ammonium, which is used to clean silicon wafers. UBE's high-purity aqueous ammonium is a high-grade product with virtually no metal ion particles thanks to our integrated manufacturing under stringent quality control that covers everything from raw material refining to manufacturing and packaging.

Packaging Special polyethylene vessels
  • Drums: 170kg (200l), 90kg (100l)
  • Cans: 18kg (20l)
  • Containers: 900kg(1m3)
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Details

High-purity nitric acid

UBE's high-purity nitric acid is a highly refined product developed for the electronics industry after accumulating vast amounts of study and research data gathered during manufacturing experiments on a variety of nitric acid products over the years. It is the perfect product for cleaning and etching silicon wafers.

Packaging
  • Drums: 250kg(200l), 140kg(100l)
  • Containers: 1.4t(1m3)
  • Tanks: 10t(7m3)
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Details

UBE RID dry-etching exhaust gas treatment equipment

UBE RID dry-etching exhaust gas treatment equipment
  • Dry treatment system
  • Improved safety for clients' manufacturing processes
  • Digital display of treatment volume
  • Two-stage warning system for replacement timing
  • Small pressure loss
  • Simple connection
  • Wide applicability
*
UBE RID is a registered trademark in Japan.
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Details

RID-TRAPPER Solid content collector

RID-TRAPPER Solid content collector

This equipment efficiently collects large quantities of solids generated in the semiconductor and liquid crystal manufacturing process. It will have a major positive impact on the manufacturing process, including reduced frequency of pipe maintenance and increased up time.

*
RID-TRAPPER is a registered trademark in Japan.
High capacity Supports capacities of 100l/min to 2,000l/min
High-performance filter Delivers high collection performance (99% or higher) thanks to cooling and filtering.
Ease of operation Even column replacement is very easy
Air-tightness testing Air-tightness of joints can be tested.
Custom specifications Unit dimensions and interlock mechanisms can be designed per customer specifications.
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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Details

RID-ACE Chamber cleaning unit

RID-ACE Chamber cleaning unit

The odor that results when cleaning chambers is largely the result of toxic gases such as HCl, HF, and Cl2. It worsens the work environment and is a major obstacle to work efficiency. This unit reduces these cases to the threshold limit value (TLV) or lower, thereby improving work efficiency.

*
RID-ACE is a registered trademark in Japan.
Exhaust capacity Max. 1.1m3/min
Target gases
  • Chlorine chemicals (HCl, Cl2, BCl3, SiC4, etc.)
  • Bromate chemicals (HBr, Br2, BBr3, etc.)
  • Byproducts of fluorine gas (HF, SiF4, SF4, etc.)
Target gas concentration 500ppm or less
Exhaust gas concentration TLV or less
Treatment agent replacement schedule Replace after blower operates 300 hours (with timer function)
Note:
This device can only be used for gases for etching equipment. Flammable gases and other kinds of gases cannot be used.
Products Inquiry Ube Industries, Ltd. Products Inquiry Form
Chemicals Company,
Battery Materials and Fine Chemicals Div.
High Purity Chemicals Gr.

Phone : +81(3)5419-6181    Fax : +81(3)5419-6259

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